LITHOGRAPHIC DEVICE LITHOGRAPHIC EXPOSURE DEVICE RECORDING MEDIUM HAVING PROGRAM RECORDED THEREON AND LITHOGRAPHIC PROCESS

摘要

Drawing device. The drawing device includes coordinate data indicating a first position that is a design position of a plurality of reference marks formed on a substrate to be exposed, coordinate data indicating a drawing pattern to be drawn on the substrate to be determined based on the first position, and An acquisition unit for acquiring coordinate data indicating a second position, which is an actual position of each of the plurality of reference marks, and a physical quantity representing a magnitude of deformation of the substrate to be exposed based on the first position and the second position In addition, each of the plurality of reference marks, a derivation unit for deriving a correction amount for the deviation of the first position and the second position, and a larger amount as the physical quantity increases from each of the correction amounts derived by the derivation unit When the drawing pattern is drawn on the substrate to be exposed on the basis of the second position, a reducing section to be reduced and a correction section to correct coordinate data indicating the drawing pattern based on the correction amount reduced by the reducing section. Doing.