首页>
外国专利>
Device and method for determining the position of a particle beam
Device and method for determining the position of a particle beam
展开▼
机译:确定粒子束位置的装置和方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
Device for determining the position of a particle beam (10), which a. a diaphragm (12) consisting of several diaphragm segments (12.1, 12.2, 12.3, 12.4) and b. a plurality of current measuring units which are each connected to a specific diaphragm segment (12.1, 12.2, 12.3, 12.4) in order to measure the electrical current flowing through the respective diaphragm segment (12.1, 12.2, 12.3, 12.4), characterized in that siec. at least one movement unit which is set up to move the diaphragm (12) relative to the beam in a plane through which the particle beam (S) passes.
展开▼