New-Generation Electro-Optic Modulator for TFT Array Inspection

Xianhal Chen

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New-Generation Electro-Optic Modulator for TFT Array Inspection

机译：用于TFT阵列检查的新一代光电调制器

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摘要

A new generation of electro-optic (EO) modulator has been developed for thin film transistor (TFT) array inspection with improved defect detection sensitivity and reliability. The new modulators are made of solvent-based polymer dispersed liquid crystal (PDLC) and by a simple spin coating and a vacuum lamination process.

机译：已经开发了用于薄膜晶体管（TFT）阵列检查的新一代电光（EO）调制器，具有改进的缺陷检测灵敏度和可靠性。新型调制器由溶剂型聚合物分散液晶（PDLC）制成，并通过简单的旋涂和真空层压工艺制成。

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《SID International Symposium: Digest of Technology Papers》 |2005年第2期|共4页
作者
Xianhal Chen;
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原文格式 PDF
正文语种 eng
中图分类通信理论;
关键词
Electro Optic Modulator; Polymer Dispersed Liquid Crystal; Thin Film Transistor; Inspection;

机译：光电调制器;高分子分散液晶;薄膜晶体管;检验;

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专利

1. New-Generation Electro-Optic Modulator for TFT Array Inspection [J] . Xianhal Chen SID International Symposium: Digest of Technology Papers . 2005,第2期

机译：用于TFT阵列检查的新一代光电调制器
2. Electro-Optic Modulated Phase Array in Hexagonally Poled Lithium Niobate for Flexible Array Illuminator Device [J] . M. PATURZO, P. FERRARO S. DE NICOLA, P. DE NATALE Ferroelectrics: Letters Section . 2007,第1期

机译：六角阵列铌酸锂中的电光调制相控阵，用于柔性阵照明装置
3. A wide-band polymeric electro-optic modulator array based on unidirectional coupling between multi-mode waveguide array and a vertical configured dumping planar waveguide [J] . Lu XJ, Wu LH, Zhang XP, Optics & Laser Technology . 2006,第8期

机译：基于多模波导阵列和垂直配置的倾卸式平面波导之间单向耦合的宽带聚合物电光调制器阵列
4. Dynamic characteristics of the PDLC-based electro-optic modulator for TFT-LCD inspection [C] . DaeHwa Jeong, Chang-Wook Jung, Kwang-Suk Jung, SPIE Conference on Optomechatronic Systems . 2002

机译：用于TFT-LCD检测的PDLC基电光调制器的动态特性
5. High-Speed Hybrid Silicon-Lithium Niobate Electro-Optic Modulators & Related Technologies [D] . Weigel, Peter O. 2018

机译：高速杂交硅锂电片电光调制器和相关技术
6. Performance of In-Pixel Circuits for Photon Counting Arrays (PCAs) Based on Polycrystalline Silicon TFTs [O] . Albert K. Liang, Martin Koniczek, Larry E. Antonuk, -1

机译：基于多晶硅TFT的光子计数阵列（PCA）像素内电路的性能
7. In-TFT-Array-Process Micro Defect Inspection Using Nonlinear Principal Component Analysis [O] . Zhi-Hao Kang, Jih-Shang Hwang, Ching-Shun Chen, 2009

机译：基于非线性主成分分析的In-TFT阵列工艺微缺陷检测
8. Monolithic electro-optic modulator array [R] . 1988

机译：单片电光调制器阵列

New-Generation Electro-Optic Modulator for TFT Array Inspection

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