Low-noise charge sensitive readout for pyroelectric sensor arrays using PVDF thin film

摘要

The paper presents a fully integrated low-noise readout circuit for the purpose of front-end amplification in pyroelectric infrared focal plane arrays (IRFPA). A low-noise and low-power charge sensitive amplifier (CSA) has been fabricated and characterised in a standard CMOS process. A value of 11.4 nV/√Hz at 100 Hz input referred noise voltage has been measured for a maximum power dissipation of 210 μW. Pyroelectric polyvinylidene fluoride (PVDF) thin films have been coated on 256-element focal plane arrays including the low-noise CSA as readout device. Experimental values of voltage responsivities of 3510 V/W on average at 10 Hz modulation frequency have been achieved for a sensing area of 105×105 μm.