MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

摘要

A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over±26? with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, microparticles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.