Waveguide electro-optic modulator in fused silica fabricated by femtosecond laser direct writing and thermal poling

摘要

An integrated electro-optic waveguide modulator is demonstrated in bulk fused silica. A Mach-Zehnder interferometer waveguide structure is fabricated by direct writing with a femtosecond laser followed by thermal poling. A 20 deg electro-optic phase shift is achieved at an operating wavelength of 1.55 (mu)m with an applied voltage of 400 V and an interaction length of 25.6 mm, which correspond to an estimated effective electro-optic coefficient of 0.17 pm/V for the TE-polarized mode.