INDUCTORS WITH CoFe AND NiFe FERROMAGNETIC LAYER

摘要

Inductance increase up to 28% was obtained for on-chip spiral inductors by employing DC-sputtered CoFe and NiFe ferromagnetic (FM) layer on top of the spirals. It was also observed that slit-patterned FM layers exhibited better quality factors than blanket FM layers, leading to values comparable to that of the inductors without FM layer.