Modular software system for computer aided design of microsystems

摘要

A modular software system to assist engineers in designing microsystems is presented. The different modules support both the system and the component design and are linked with each other by a workflow management system. In particular, this paper presents the co-operation of the modules RUMTOPF, SUZANA and μ-TOAST. They assist the designer in the definition and validation of process sequences, the simulation of wet chemical etching of silicon and the tolerance management. The usage and usefulness of the presented software system is illustrated by an example showing the design of an acceleration sensor.