High sensitivity in gas analysis with photoacoustic detection

摘要

Introduction of a new type of pressure sensor has been shown to improve orders of magnitude the sensitivity of a photoacoustic measurement system using a black body radiation source. A new pressure sensor was developed to overcome the limitations in the capacitive microphone technology and to obtain ultimate sensitivity in photoacoustic gas detection when using low modulation frequency below 500 Hz. The pressure sensor is a cantilever-type microphone with interferometric measurement of the sensor displacement. By using conventional filter-type photoacoustic setup with the cantilever microphone and a black body radiation source, we obtained a detection limit in the sub-ppb range for methane gas with 100 s measurement time. (C) 2003 Elsevier B.V. All rights reserved.