Novel Fabrication Technique of Suspended Nanowire Devices for Nanomechanical Applications

摘要

Semiconductor nanowires (NWs) are one of the most promising nanoscale materials for use in nanoelectromechanical systems. However, the accurate control of their position and alignment during fabrication has been a persistent challenge. Herein, inkjet‐printing and trenches filled with PMGI are used for the precise assembly of suspended NWs. The method allows us to accurately control the positioning processes, and a fabricated InAs NW mechanical resonator shows electrically excited and detected resonance at 15.7 MHz with the quality factor of 10 000 at 2.2 K. The resonance frequency can be tuned by applying a voltage to an air‐gap bottom gate, and Duffing nonlinearity is confirmed with high‐amplitude actuation. This accurate and flexible fabrication method is applicable to highly integrated device designs, such as those for nanoelectromechanical networks and acoustic metamaterials.