Review-Understanding and Controlling Electrochemical Effects in Wet Processing

摘要

Electrochemical techniques have long been used in understanding and improving the performance of various wet chemical processing steps such as etching, cleaning, passivation and rinsing used in integrated circuit (IC) manufacturing. The objective of this paper is to provide a few examples of how electrochemical techniques can be used to probe some important areas in wet processing. It is not intended to be an exhaustive review of techniques and problems reported in the literature. (C) The Author(s) 2016. Published by ECS. All rights reserved.