Modelling and experimental study of machined depth in AFM-based milling of nanochannels

摘要

A nanochannel depth prediction model for an atomic force microscopy (AFM)-based nano-milling fabrication technique was developed and the relationship between the normal load, tip feed, and nanochannel depth was systematically investigated. Machining experiments were performed to fabricate nanochannels on a 2A12 aluminum alloy surface, the depth of which was compared with that calculated with the model. The model predicted the depth of the nanochannels accurately when a feed in the range of 40-90 nm was used during machining. The cutting mechanism played an important role in determining the consistency of the experimental and theoretical results. In addition, the effects of normal load and feed on the surface quality of the machined nanochannel were studied. A nanochannel with a 3D structure at the bottom is presented by the nano-milling method. To machine a nanochannel with a desired depth, the appropriate normal force and feed to guarantee the surface quality can be selected simply and easily using this model.