Controlling aliased dynamics in motion systems? An identification for sampled-data control approach

摘要

Sampled-data control systems occasionally exhibit aliased resonance phenomena within the control bandwidth. The aim of this paper is to investigate the aspect of these aliased dynamics with application to a high performance industrial nano-positioning machine. This necessitates a full sampled-data control design approach, since these aliased dynamics endanger both the at-sample performance and the intersample behaviour. The proposed framework comprises both system identification and sampled-data control. In particular, the sampled-data control objective necessitates models that encompass the intersample behaviour, i.e., ideally continuous time models. Application of the proposed approach on an industrial wafer stage system provides a thorough insight and new control design guidelines for controlling aliased dynamics.