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Wide-range displacement sensor based on variable line-spacing grating and Y-type twin-core fibre

机译:基于可变线间距光栅和Y型双芯光纤的宽范围位移传感器

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摘要

In the paper, a wide range displacement sensor based on the variable line-spacing (VLS) grating was proposed and its displacement characteristics at different temperature environments were measured. The VLS grating was inscribed by electron beam lithography method, and the sensor mechanical structure was designed and fabricated. A broadband light was irradiated to the VLS grating though a twin-core Y-type fibre, and an aluminizing reflector mirror was used to adjust light spot positions to change the displacement. In the experiment, the temperature stabilities of sensor were testedwhenthe temperature rose from-20°C to 60°C, and themaximumdrift of diffraction peak was less than 1.01 nm. In 30mmlength displacements, the diffraction wavelength was shifted simultaneously, the sensitivity was 15.941 and 15.917nm/mm at 20°C and 50°C respectively, and the linearity was 0.994 both at 20°C and 50°C.
机译:本文提出了一种基于可变线间距(VLS)光栅的宽量程位移传感器,并测量了其在不同温度环境下的位移特性。采用电子束刻蚀方法刻写了VLS光栅,设计并制作了传感器的机械结构。通过双芯Y型光纤将宽带光照射到VLS光栅上,并使用镀铝反射镜调整光斑位置以改变位移。在实验中,当温度从-20°C上升到60°C时,测试了传感器的温度稳定性,衍射峰的最大漂移小于1.01nm。在30mm长的位移中,衍射波长同时发生偏移,在20℃和50℃下的灵敏度分别为15.941和15.917nm/mm,在20℃和50℃下的线性度均为0.994。

著录项

  • 来源
    《Journal of Modern Optics》 |2020年第21期|共8页
  • 作者单位

    Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument Beijing Information Science &

    Technology University Beijing People's Republic of China;

    Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument Beijing Information Science &

    Technology University Beijing People's Republic of China;

    Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument Beijing Information Science &

    Technology University Beijing People's Republic of China;

    No. 23 Research Institute China Electronics Technology Group Corporation Shanghai People's Republic of China;

    Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument Beijing Information Science &

    Technology University Beijing People's Republic of China;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 光学;
  • 关键词

    Variable line-spacing grating; optical displacement sensor; electron beam lithography;

    机译:None;

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