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首页> 外文期刊>Journal of the Optical Society of America, B. Optical Physics >Fluence-dependent sputtering yield measurement, surface morphology, crater depth, and hardness of laser-irradiated Zr in N-2 and Ne environments
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Fluence-dependent sputtering yield measurement, surface morphology, crater depth, and hardness of laser-irradiated Zr in N-2 and Ne environments

机译:流量依赖性溅射产量测量,表面形态,火山口深度和N-2和NE环境中的激光辐照Zr的硬度

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Fluence-dependent sputtering yield measurements, surface morphology, crater depth, and hardness of laser-irradiated Zr in N-2 and Ne environments have been investigated by employing an Nd:YAG laser (532 nm, 6 ns, 10 Hz). The targets were exposed to laser pulses at various fluences ranging from 16 J cm(-2) to 60.8 J cm(-2) under the N-2 and Ne environments at a pressure of 10 Torr. Various features of irradiated targets, such as sputtering yield measurement, surface morphology, crater depth, chemical composition, and microhardness, are analyzed by quartz crystal microbalance (QCM), scanning electron microscope (SEM), optical microscope, energy dispersive x-ray spectroscopy (EDX), and Vicker microhardness tester techniques, respectively. QCM measurements reveal that the sputtering yield increases with increasing the fluence in both N-2 and Ne environments. However, the values of sputtering yield are slightly higher in the case of N-2 as compared to Ne. SEM analysis reveals the formation of cones, cavities, periodic ridges, and droplets at the central ablated areas, whereas the periodic ridges, cones, droplets, clusters, and agglomerates are formed at the inner boundaries of laser ablated Zr in both N-2 and Ne. Distinct grain growth is observed at the outer boundaries in both environments. The characteristic features which are only present on Zr-irradiated surfaces in the case of N-2 are cavities and in the case of Ne are droplets, clusters, and agglomerates. It is revealed that the surface structural growth is strongly dependent upon the laser fluence and nature of the ambient environment. The crater depth of laser-irradiated Zr is measured by using depth profilometry of an optical microscope. The higher observed values of sputtering yield and crater depth of laser ablated Zr in the case of N-2 as compared to Ne are well correlated with distinct surface structures. EDX spectroscopy analysis reveals the nitride formation in the case of laser irradiation of Zr in a N-2
机译:通过采用Nd:YAG激光(532nm,6ns,10 Hz)研究了Lif依赖性溅射产量测量,表面形态,火山口深度和激光辐照Zr的硬度。在N-2和NE环境下,在10托的压力下,将靶在各种流量的激光脉冲暴露于从16J厘米(-2)至60.8J厘米(-2)。通过石英晶体微稳定(QCM),扫描电子显微镜(SEM),光学显微镜,能量分散X射线光谱分析辐射靶标的各种辐射靶标,如溅射产率测量,表面形态,陨石坑深度,化学成分和微硬度(EDX)和维氏微硬度测试仪技术。 QCM测量表明,溅射产量随着N-2和NE环境的使用量增加而增加。然而,与NE相比,在N-2的情况下,溅射产率的值略高。 SEM分析揭示了中央消融区域的锥体,腔,周期性脊和液滴的形成,而周期性脊,锥体,液滴,簇和聚集体形成在N-2中的激光烧蚀Zr的内边界处NE。在这两个环境中的外边界中观察到不同的晶粒生长。在N-2的情况下仅存在于Zr照射表面上的特征特征是空腔,并且在NE是液滴,簇和附聚物的情况下。据透露,表面结构生长强烈依赖于环境环境的激光流量和性质。通过使用光学显微镜的深度轮廓测量来测量激光辐照Zr的火山口深度。与NE相比,在N-2的情况下,在N-2的情况下,激光烧蚀Zr的溅射产率和火山口深度的较高观察到的值与不同的表面结构良好。 EDX光谱分析显示在N-2中Zr激光照射的情况下氮化物形成

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