Numerical analysis of a miniaturized design of a Fabry-Perot resonator based on silicon strip and slot waveguides for bio-sensing applications

摘要

A miniaturized design of a Fabry-Perot resonator based on silicon strip and slot waveguide is presented. The corrugated Bragg gratings and a cavity are structured on both sides of a waveguide. The spectral characteristics of both the resonator designs are studied. The variation of the medium refractive index is detected by monitoring the shift of the spectral maxima of the Fabry-Perot cavity. The transmission spectrum and electric field distribution of the sensor structures are simulated using finite-element method. The resonator based on slot-waveguide shows better sensitivity and figure of merits as compared to strip waveguide. Our proposed sensor design has the potential to find further applications in biomedical science and nano-photonic circuits.