Formation of Cu+ n (n ? 13), Ar+ n (n = 1, 2), and ArCu+ ions during sputtering of a copper surface by low-energy Ar+ ion bombardment in a dilute argon atmosphere

摘要

Formation of monoatomic Ar+ and Cu+, diatomic Ar2 + , ArCu+, and Cu2 + , and triatomic Cu3 + ions during 500 eV Ar+ ion bombardment of a copper surface in a dilute argon atmosphere was investigated by means of energy-resolved mass spectrometry. Energy spectra of Arn + (n = 1, 2), Cun + (n = 1 - 3), and ArCu+ ions show distinct features which are related to the specific formation processes taking place in the plasma region and during ion bombardment of the Cu cathode.