Influence of scanning rate on quality of AFM image: Study of surface statistical metrics

Sobola Dinara; ??lu ?tefan; Solaymani Shahram; Grmela Lubomír

摘要

Abstract >The purpose of this work is to study the dependence of AFM‐data reliability on scanning rate. The three‐dimensional (3D) surface topography of the samples with different micro‐motifs is investigated. The analysis of surface metrics for estimation of artifacts from inappropriate scanning rate is presented. Fractal analysis was done by cube counting method and evaluation of statistical metrics was carrying out on the basis of AFM‐data. Combination of quantitate parameters is also presented in graphs for every measurement. The results indicate that the sensitivity to scanning rate growths with fractal dimension of the sample. This approach allows describing the distortion of the images against scanning rate and could be applied for dependences on the other measurement parameters. The article explains the relevance and comparison of fractal and statistical surface parameters for characterization of data distortion caused by inappropriate choice of scanning rate. </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><abstract xmlns =“http://www.wiley.com/namespaces/wiley”type =“main”> <title type =“main”>抽象</ title> >这项工作的目的是研究AFM数据可靠性对扫描速率的依赖性。研究了具有不同微观图案的样品的三维（3D）表面形貌。呈现了对来自不适当扫描率的伪影估计的表面度量分析。分形分析通过立方体计数方法进行，统计指标评估是在AFM数据的基础上进行。定量参数的组合也在每次测量的图表中呈现。结果表明，对样品的分形尺寸扫描速率生长的敏感性。该方法允许描述图像的失真反馈扫描速率，并且可以应用于对其他测量参数的依赖性。 The article explains the relevance and comparison of fractal and statistical surface parameters for characterization of data distortion caused by inappropriate choice of scanning rate. </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" >著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-24994/'>《Microscopy research and technique》</a> <b style="margin: 0 2px;">|</b><span>2017年第12期</span><b style="margin: 0 2px;">|</b><span>共9页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Sobola Dinara&option=202" target="_blank" rel="nofollow">Sobola Dinara;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=??lu ?tefan&option=202" target="_blank" rel="nofollow">??lu ?tefan;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Solaymani Shahram&option=202" target="_blank" rel="nofollow">Solaymani Shahram;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Grmela Lubomír&option=202" target="_blank" rel="nofollow">Grmela Lubomír;</a> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> <p>Faculty of Electrical Engineering and Communication Physics DepartmentBrno University of Technology Technická 8Brno 616 00 Czech Republic;</p> <p>Faculty of Mechanical Engineering Department of AET Discipline of Descriptive Geometry and Engineering GraphicsTechnical University of Cluj‐Napoca 103‐105 B‐dul Muncii StCluj‐Napoca Cluj 400641 Romania;</p> <p>Department of Physics Science and Research BranchIslamic Azad UniversityTehran Iran;</p> <p>Faculty of Electrical Engineering and Communication Physics DepartmentBrno University of Technology Technická 8Brno 616 00 Czech Republic;</p> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li > <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span><a href="https://www.zhangqiaokeyan.com/clc/19294.html" title="显微镜">显微镜;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=atomic force microscopy&option=203" rel="nofollow">atomic force microscopy;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=fractal analysis&option=203" rel="nofollow">fractal analysis;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=scanning rate&option=203" rel="nofollow">scanning rate;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=surface micro‐morphology&option=203" rel="nofollow">surface micro‐morphology;</a> </p> <div class="translation"> 机译：原子力显微镜;分形分析;扫描率;表面微观形态; </div> </li> </ul> </div> </div> <div class="literature cardcommon"> <div class="similarity "> <h3 class="all_title" id="enpatent66">相似文献</h3> <div class="similaritytab clearfix"> <ul> <li class="active" >外文文献</li> <li >中文文献</li> <li >专利</li> </ul> </div> <div class="similarity_details"> <ul > <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/journal-foreign-detail/0704023680091.html">Influence of scanning rate on quality of AFM image: Study of surface statistical metrics</a> <b>[J]</b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Sobola Dinara&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Sobola Dinara,</a> <a 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