Fabrication of high fill-factor aspheric microlens array by dose-modulated lithography and low temperature thermal reflow

摘要

A cost-effective fabrication method for high quality and high fill-factor aspheric microlens arrays (MLAs) is developed. In this method, the complex shape of aspheric microlens is pre-modeled via dose modulation in a digital micromirror device (DMD) based maskless projection lithography system. Digital masks for several bottom layers are replaced from circle to hexagon for the purpose of enhancing the fill-factor of MLAs, then a low temperature thermal reflow process is conducted, after which the average surface roughness of microlens is improved to 0.427 nm while the pre-modeled profile keeps unchanged. Experimental results show that the fabricated aspheric MLAs have almost 100% fill-factor, high shape accuracy and high surface quality. The presented method may provide a promising approach for rapidly fabricating high quality and high fill-factor aspheric microlens in a simple and low-cost way.