Preparation and Application of the Mixed Metal Oxide Film Based on Electron-Beam Physical Vapor Deposition for the Electrochemical Potential Sensors

摘要

Potential sensor is the key element to assemble corrosion sensors or establish the corrosion control system in civil engineering. EB-PVD (Electron-beam Physical Vapor Deposition) technique is applied to prepare the MMOF (mixed metal oxide film) to integrate the electrochemical potential sensors. The microstructure, phase composition and component of the prepared state, heat treated state and oxidized state films are investigated, respectively. The optimized preparation process of the MMOF is obtained. Furthermore, the prepared MMOF is used to integrate the potential sensors, and the electrochemical features of the potential sensors are characterized. Finally, the prepared potential sensor is applied to monitor the corrosion status of the RC panels. The results indicate that the prepared MMOF is very suitable to be as the electrochemical functional material, and the performance of the potential sensors is perfect.