0.85Rh 0.15 and Ir 0.7Rh 0.3 thin films as electrodes for surface acoustic waves applications above 800°C in air atmosphere]]>

摘要

Highlights?IrxRh1-x (0.7≤x≤1) multilayers thin films have been deposited on langasite substrates. Some samples were processed to achieve SAW devices.?As-deposited and processed samples underwent different annealing periods between 800 and 950°C for several days in air.?XRD analyses revealed the complete oxidation of all samples. TEM analyses show that the multilayered structure is lost during annealing.?The electrical conductivity of the oxidized samples improves with the initial Ir rate.?SAW measurements show that a first annealing cycle is necessary to oxidize and thus stabilize the Ir-based electrodes.AbstractIn this paper, we investigate the suitability of Ir, Ir0.85Rh0.15and Ir0.7Rh0.3<