Fabrication of helical photonic structures with submicrometer axial and spatial periodicities following 'inverted umbrella' geometry through phase-controlled interference lithography

摘要

In this Letter we report for the first time, to the best of our knowledge, a phase spatial light modulator (SLM)-based interference lithography (IL) approach for the realization of hexagonally packed helical photonic structures with a submicrometer scale spatial, as well as axial, periodicity over a large area. A phase-only SLM is used to electronically generate six phase-controlled plane beams. These six beams from the front side and a direct central backside beam are used together in an "inverted umbrella" geometry setup to realize the desired submicrometer axial periodic chiral photonic structures through IL. The realized structures with 650 nm spatial and 353 nm axial periodicities on negative photoresist can be used as an optical filter and refractive index sensor, as evidenced from the FDTD-based simulation study on its optical properties. Further, the fabricated templates can be transferred to metals such as silver or aluminum for the realization of a metamaterial-based broadband circular polarizer ranging from 1 to 3.5 mu m of near-infrared spectra. (c) 2017 Optical Society of America