Measuring thermal conductivity of thin films and coatings with the ultra-fast transient hot-strip technique

摘要

This paper reports the ultra-fast transient hot-strip (THS) technique for determining the thermal conductivity of thin films and coatings of materials on substrates. The film thicknesses can vary between 10nm and more than 10m. Precise measurement of thermal conductivity was performed with an experimental device generating ultra-short electrical pulses, and subsequent temperature increases were electrically measured on nanosecond and microsecond time scales. The electrical pulses were applied within metallized micro-strips patterned on the sample films and the temperature increases were analysed within time periods selected in the window [100ns-10s]. The thermal conductivity of the films was extracted from the time-dependent thermal impedance of the samples derived from a three-dimensional heat diffusion model. The technique is described and its performance demonstrated on different materials covering a large thermal conductivity range. Experiments were carried out on bulk Si and thin films of amorphous SiO _2 and crystallized aluminum nitride (AlN). The present approach can assess film thermal resistances as low as 10 ~8Km ~2W ~1 with a precision of about 10%. This has never been attained before with the THS technique.