A system for measurement of surface roughness based on total integrated scattering at 532 and 355nm is built and demonstrated. Surfaces up to 25mm × 25mm are scanned in 6min with a spatial resolution of 0.4mm. Careful attention to reducing stray light and purging the measurement chamber with filtered air allow scattering resolution better than 10~(-5). Surface roughness measurements better than 1nm RMS are demonstrated and confirmed by comparison measurements with an atomic-force microscope.
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