Disparity pattern-based autostereoscopic 3D metrology system for in situ measurement of microstructured surfaces

摘要

This paper presents a disparity pattern-based autostereoscopic (DPA) 3D metrology system that makes use of a microlens array to capture raw 3D information of the measured surface in a single snapshot through a CCD camera. Hence, a 3D digital model of the target surface with the measuring data is generated through a system-associated direct extraction of disparity information (DEDI) method. The DEDI method is highly efficient for performing the direct 3D mapping of the target surface based on tomography-like operation upon every depth plane with the defocused information excluded. Precise measurement results are provided through an error-elimination process based on statistical analysis. Experimental results show that the proposed DPA 3D metrology system is capable of measuring 3D microstructured surfaces with submicrometer measuring repeatability for high precision and in situ measurement of microstructured surfaces. (C) 2015 Optical Society of America