The fluctuation sensitivity limit of the induction method for the measurement of surface roughness has been determined. It has been shown that, for a profilograph used in this work, the minimum value of magnetic induction resulting from current thermal fluctuations is equal to 3 x 10(-7) G. According to the experimental data, a change in the surface relief height by 2 nm varies the magnetic induction by 2 x 10(-6) G, i.e., by a value exceeding the value determined for the thermal fluctuations by an order of magnitude. Hence, the design of the differential inductive sensor proposed for the profilograph can be used to measure the surface roughness on the order of several fractions of a nanometer.
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机译：已经确定了用于测量表面粗糙度的感应方法的波动灵敏度极限。已经表明，对于用于这项工作的轮廓仪，由电流热波动引起的磁感应的最小值等于3 x 10（-7）G。根据实验数据，表面起伏高度的变化磁感应强度变化2 nm时，磁感应强度会发生2 x 10（-6）G的变化，即，其值超出为热波动确定的值一个数量级。因此，为轮廓仪提出的差分电感传感器的设计可用于测量表面粗糙度，约为纳米的几分之一。
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