Generation of Large-Area Highly-Nonequlibrium Plasma in Pure Hydrogen at Atmospheric Pressure

摘要

Diffuse Coplanar Surface Barrier Discharge (DCSBD) is a novel type of atmospheric-pressure plasma source developed for high-speed large-area surface plasma treatments. Basic characteristics of DCSBD operated in pure atmospheric-pressure hydrogen were measured using optical and emission spectroscopy methods, and its potential for the surface treatment application was demonstrated by hydrogen plasma reduction of Cu_2O thin layers. The discharge generates a thin layer of diffuse non-equilibrium plasma with a high power density of 70 Wcm~(?3). The mean electron density and electron temperature derived from spectroscopic data were 1.3 x 10~(16)cm~(?3) and 19 x 10~3K, and the surface Cu_2O layers forming a weak boundary were reduced to metallic copper within several seconds.