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首页> 外文期刊>電子情報通信学会技術研究報告. 電子デバイス. Electron Devices >A Study on Lateral Surface Treatment of the CdTe X-ray image-sensor
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A Study on Lateral Surface Treatment of the CdTe X-ray image-sensor

机译:CdTe X射线图像传感器的侧表面处理研究

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摘要

A CdTe X-ray sensor for dental X-ray imaging is fabricated and the effect of a lateral surface treatment is investigated. Due to non-uniform edge pixels in the CdTe X-ray sensor, the number of effective pixels that can be used for the final image is reduced, and a line defect is introduced when several sensors are put together for the target resolution. To improve the roughness of the lateral surface, a lateral surface polishing process is introduced. The polishing process reduces dead pixels by 76%, from 304 to 76. By lateral surface polishing, most of the dead pixels near the device edge become normal pixels. The non-uniform edge pixels are improved by the lateral surface treatment without affecting the central pixels of the CdTe X-ray image sensor. The effective resolution is extended to the edges of device; therefore, the entire area of the CdTe X-ray sensor can be used for the final image.
机译:制作了用于牙科X射线成像的CdTe X射线传感器,并研究了侧面处理的效果。由于CdTe X射线传感器中边缘像素的不均匀,减少了可用于最终图像的有效像素的数量,并且当将多个传感器组合在一起以达到目标分辨率时会引入线缺陷。为了改善侧面的粗糙度,引入了侧面抛光工艺。抛光过程将坏点减少了76%,从304减少到了76。通过侧面抛光,靠近设备边缘的大多数坏点都变为正常像素。通过侧面表面处理可以改善不均匀边缘像素,而不会影响CdTe X射线图像传感器的中心像素。有效分辨率扩展到设备的边缘;因此,CdTe X射线传感器的整个区域都可用于最终图像。

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