Consideration of gyro-sensor using quartz crystal trident-type tuning fork resonator for detection of multiple-axis angular velocities

摘要

We investigate the gyro-sensor which is composed of a quartz crystal resonator in order to detect multi-axis angular velocities. In this case, the research point is in the vibration problem of a quartz crystal resonator in three-axis directions. In other words, when such a gyro-sensor is composed concretely, degeneration of multi-resonance modes having vibration freedoms on the three-axis directions is required. In order to make clear this composition condition, we simulated vibrational characteristics of a quartz crystal tuning fork resonator using the ready made FEM software of ANSYS. The result has proved that the couplings among multi-resonance are found due to anisotropic quartz crystal material constants. That is, such couplings can not be avoided when the gyro-sensor to detect multi-axis angular velocities is composed using a quartz crystal resonator, and therefore the realization of such a gyro-sensor has been found not to be easy. This paper deals with FEM simulation results on the construction of such a gyro-sensor using a quartz crystal trident-type tuning fork resonator, and reports some reference deta for construction of a quartz crystal multi-axis gyro-sensor.