Design of human machine interface (HMI) system for vacuum deposition unit

摘要

Vacuum deposition system is an integral part of fabrication of semiconductor devices and ICs. Operation of such system for the deposition of different materials is a complicated and time consuming process. In addition, the operator should have sufficient skills to handle such delicate system. If operating processes are lengthy or complex and to avoid the complexity we can go to the Human Machine Interface. In this paper, design of Human Machine Interface (HMI) system for vacuum Deposition unit is described. It is very user friendly system and provides a mimic screen to visualize the process. This system can be operated in two modes: a conventional manual and a totally self operating or automatic mode. This system is supplemented by computer aided instructions (CAI) for the user.