Design Analysis, Measurement and Nanometer Accuracy Position Control of a Low Friction Pneumatic Table embedded with Aerostatic Bearings

摘要

In the paper, we design a low friction pneumatic cylinder and a sliding table, and both of them are embedded with aerostatic bearings. The finite difference method is used to study the loading capacity, the stiffness, and the air leakage flow under various parameters. A low friction pneumatic table is constructed by combining the pneumatic cylinder and the sliding table. The characteristics for the friction force versus velocity of the pneumatic cylinder and the pneumatic table are measured. Moreover, a hybrid self-tuning fuzzy sliding mode controller with dead zone and load compensation is designed to precisely control the position of the pneumatic table. The experimental results have shown that the pneumatic table has positioning accuracy of 20 nm, the resolution of the pulse scale.