The production of nanostructures by mechanical forming

摘要

The field of nanometre scale mechanical forming has seen rapid development with the arrival of high resolution, massive parallel techniques such as nanoimprint. Despite a growing number of devices and surface architectures demonstrated, a more fundamental understanding of the mechanics and physics underlying the forming operations is only beginning to emerge. In this review, recent developments in understanding the production of nanostructures through mechanical means at surfaces are surveyed. The main focus is on the replica moulding of viscoelastic liquids and the forging of amorphous solids, with fidelity to design specification judged in terms of shape. The effects of sub-continuum structure on the local specification of geometry will also be briefly considered.