MONTE CARLO SIMULATION OF ELECTRON MOTION IN THE CATHODE REGION OF A MAGNETRON GLOW DISCHARGE IN ARGON

摘要

The motion of electrons in the cathode region of a magnetron glow discharge in low-pressure argon has been studied by Monte Carlo simulation. The influences of the transverse magnetic field on energy distribution of electron flux and ionization have been investigated for normal and abnormal discharges. It has been shown that the magnetic field increases collisions, and consequently decreases the mean electron energy. In normal discharges, under the magnetic field, fewer electrons enter the negative glow region with high energy, while ionization is remarkably enhanced in the cathode region. in abnormal discharges, it is found that the magnetic field required to influence the discharge has to be stronger than that in normal discharges. Under such a magnetic field, for example 0.3 T, though there are still a great number of electrons entering the negative glow region with energy corresponding to the cathode fall potential, the mean electron energy is decreased, and the electrons entering the negative glow region are less beam-like. Analyses for the simulation results and consideration of the practical use of the magnetic field have been given. [References: 14]