Choosing the synthesis parameters of hologram-projectors for photolithography

摘要

This paper discusses features of the synthesis of hologram-projectors intended for use in a holographic version of the photolithographic process. The main attention is paid to how the discretization of the object and the hologram affects the structure of the reconstructed image. The requirements imposed on the calculational and display parameters of the synthesized holograms are formulated and substantiated. It is established that discretization of the synthesized holograms not only causes additional reconstructed images to appear but also restricts the minimum size of the elements of the reconstructed images to 1.5 lambda. (c) 2008 Optical Society of America.