首页> 外文期刊>Journal of Materials Chemistry, C. materials for optical and electronic devices >Fabrication of polymeric and silica ceramic porous microstructures by perfluoropolyether based soft lithography
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Fabrication of polymeric and silica ceramic porous microstructures by perfluoropolyether based soft lithography

机译:基于全氟聚醚的软光刻技术制备聚合物和二氧化硅陶瓷多孔微结构

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摘要

Various porous micropatterns were successfully fabricated by closely packing polystyrene (PS) spheres and silica beads in the grooves on the surface of a PDMS mold, which were obtained by a direct evaporation-induced self-assembly method. Subsequently, UV-cured acrylated perfluoropolyether with low surface energy easily enabled the transfer of the perfluoropolyether-filled composite patterns in PDMS mold onto a substrate. Three-dimensional (3D) ordered perfluoropolyether or silica ceramic porous microstructures were prepared by removal of PS spheres or perfluoropolyether binder as the sacrificial materials, respectively. Moreover, line, grid and circle shapes of porous micropatterns in a single layer or double layers were also fabricated with the aid of different shaped PDMS molds.
机译:通过将聚苯乙烯(PS)球和二氧化硅珠紧密堆积在PDMS模具表面的凹槽中,可以成功制造出各种多孔微图案,这些图案是通过直接蒸发诱导自组装方法获得的。随后,具有低表面能的紫外线固化丙烯酸酯化全氟聚醚可以轻松地将PDMS模具中填充全氟聚醚的复合图案转移到基材上。通过分别去除PS球或作为牺牲材料的全氟聚醚粘合剂,制备了三维(3D)有序全氟聚醚或二氧化硅陶瓷多孔微结构。此外,借助于不同形状的PDMS模具,还制造了单层或双层中的多孔微图案的线,网格和圆形形状。

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