Fabrication of Highly-Ordered Nanopatterned Copper Nanowire Arrays by Photolithography

摘要

Two different patterns, one being circular and the other being QDU, of copper (Cu) nanowire arrays were successfully produced by electrochemical deposition and photolithography. The highly-ordered patterns of Cu nanowire arrays were observed to stand freely on the substrate using scanning electron microscopy (SEM). Chemical analyses have been performed on Cu nanowires using energy dispersive X-ray spectroscopy (EDS). The results confirmed that it is mainly composed of Cu. Selected-area electron diffraction (SAED) pattern indicated the nanowires are single crystalline and the growth direction of the nanowires is along the [220] direction. With the deposition time increasing, the length of Cu nanowires increaseed.