Subwavelength focusing of laser light by microoptics

摘要

Near-field scanning optical microscope (NSOM) measurements revealed that a linearly polarized Gaussian beam of wavelength λ = 532 nm focused with a binary zone plate (ZP) of focal length λ, radius 7 μm, and groove depth 510 nm, fabricated in hydrogen silsesquioxane, produces a focal spot of size FWHM = (0.44 ± 0.02)λ, with the side lobes being lower than 10% of the intensity peak in the focus. Replacing the incident 532 nm wavelength with a 633 nm wavelength resulted in a 1.8 times shorter focal length and a tighter (in terms of wavelengths) focal spot of FWHM = (0.40 ± 0.02)λ. This value is smaller than the scalar diffraction-limited size in vacuum, FWHM = 0.51λ. This is the smallest focal spot so far experimentally obtained for a binary phase ZP and the root-mean-square deviation of the experimental curve from a FDTD simulation is 5%. We show that the metallic pyramid-shaped cantilever with a 100-nm-hole in the tip that is used in the NSOM is only able to detect the transverse electric field component. The FDTD simulation showed such a cantilever to be over 3 times more sensitive to the transverse electric field component than to the longitudinal one. Using the Richards-Wolf (RW) formulae, the near-focus intensity distribution can be calculated with 6% error for focal lengths larger than 4λ. It is usually assumed that the Debye theory and the RW formulae are only valid for focal lengths much larger than the incident wavelength. By FDTD simulation, we showed that when illuminating the ZP by a radially (rather than linearly) polarized beam, a decrease in the focal spot transverse size did not result in a substantially reduced total volume of focus (4%).