TOC Removal of Raw Industrial Wastewater from LSI Photo-Resist Processing with H_2O_2/UV in a Batch Reactor

Wei-Jie Hou; Satoshi Tsuneda; Akira Hirata

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TOC Removal of Raw Industrial Wastewater from LSI Photo-Resist Processing with H_2O_2/UV in a Batch Reactor

机译：间歇反应器中H_2O_2 / UV在LSI光刻胶工艺中TOC去除工业原废水

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The raw industrial wastewater from LSI photo-resist processing which contains 1,2-naphthoquinone-2-diazido-5-sulfonic acid sodium salt as a main component with high NaCl concentration(>20 kg/m~3), is very difficult to treat.

机译：以NaCl浓度高（> 20 kg / m〜3）为主要成分的1,2-萘醌-2-重氮基-5-磺酸钠为主要成分的LSI光阻工艺产生的工业废水很难处理。对待。

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来源
《Journal of Chemical Engineering of Japan》 |2001年第3期|共4页
作者
Wei-Jie Hou; Satoshi Tsuneda; Akira Hirata;
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正文语种 eng
中图分类一般性问题;
关键词
LSI photo-resist; raw indusrial wastewater; hydrogen peroxide; TOC removal; UV;

机译：LSI光阻剂;工业废水;过氧化氢;TOC去除;紫外线;

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1. TOC Removal of Raw Industrial Wastewater from LSI Photo-Resist Processing with H_2O_2/UV in a Batch Reactor [J] . Wei-Jie Hou, Satoshi Tsuneda, Akira Hirata Journal of Chemical Engineering of Japan . 2001,第3期

机译：间歇反应器中H_2O_2 / UV在LSI光刻胶工艺中TOC去除工业原废水
2. TOC Removal of 2,4,5-Trichlorophenol Synthetic Wastewater with H_2O_2/UV in a Batch Reactor [J] . Wei-Jie Hou, Satoshi Tsuneda, Akira Hirata Journal of Chemical Engineering of Japan . 2001,第8期

机译：H_2O_2 / UV在间歇反应器中TOC去除2,4,5-三氯苯酚合成废水
3. Efficient TOC Removal of Wastewater Containing 1, 2-Naphthoqunone-2-diazido-5-sulfonic Acid Sodium Salt with H_2O_2/UV in a Batch Reactor [J] . Wei-Jie Hou, Satoshi Tsuneda, Akira Hirata Journal of Chemical Engineering of Japan . 2001,第9期

机译：间歇反应器中H_2O_2 / UV去除含1,2-萘醌-2-重氮基-5-磺酸钠，1,2-废水的有效TOC
4. OXIDATION OF ALIPHATIC COMPOUNDS AND OF INDUSTRIAL WASTEWATERS BY Fe(II)/H_2O_2, Fe(II)/H_2O_2/UV AND H_2O_2/UV : A COMPARATIVE STUDY [C] . Patrick Baldoni, Joseph De Laat, Stephan Plisson-Saune, International conference on advanced oxidation technologies for water and air remediation . 2001

机译：用Fe（II）/ H_2O_2，Fe（II）/ H_2O_2 / UV和H_2O_2 / UV氧化脂族化合物和工业废水的氧化剂：对比研究
5. Effects of phenolic compounds on TOC and nitrogen removal from potato wastewater using anaerobic-oxic-anoxic process. [D] . Lerssupochawanich, Chatchawal. 2000

机译：厌氧-高氧-缺氧工艺中酚类化合物对马铃薯废水中总有机碳和脱氮的影响。
6. Pilot plant study on nitrogen and phosphorus removal in marine wastewater by marine sediment with sequencing batch reactor [O] . Jinsoo Kim, Sangrim Kang, Hyun-Sook Kim, 2020

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7. Sulfate removal from industrial wastewaters in fixed film anaerobic sequential batch reactor [O] . SARTI, Arnaldo, SILVA, Ariovaldo José da, CÔRTES, Roberto Sarti, 2013

机译：固定膜厌氧顺序分批反应器中工业废水中的硫酸盐去除
8. UV-Ozone and UV-Oxygen Process for Color Removal from Textile Dyeing and Finishing Wastewaters [R] . Poon, C. P. C. , Vittimberga, B. M. 1980

机译：UV-Ozone和UV-Oxygen工艺用于从纺织品染色和整理废水中去除颜色

TOC Removal of Raw Industrial Wastewater from LSI Photo-Resist Processing with H_2O_2/UV in a Batch Reactor

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