Nowadays, electron and ion microprobing and translucent systems are basic tools of modern micro-technology and nanotechnology [1-6]. One of the main factors limiting the resolving power of these systems is the presence of spherical and chromatic axial aberrations. Existing methods of aberration correction [1,2] make it possible to improve only small (<1 mm) coefficients of axial aberrations intrinsic to electron microscopes rather than relatively large (up to 1 m) aberration coefficients of ion-optical systems.
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