Microstructure of diamond-like carbon films prepared by cathodic arc deposition

摘要

Diamond-like carbon films were synthesized under vacuum, agron, methane and hydrogen circumstance by cathodic arc deposition from graphite cathodes. Electron patterns and high resolution micrographs indicated that graphite crystal cathodes were decomposed under plasma circumstance and amorphous carbon films were formed in all the cases of film deposition. The sp~3/sp~2 ratio was measured by energy loss electron spectroscopy and X-ray photoelectron s pectroscopy. The films, synthesized under hydrogen plasma, had the largest sp~3/sp~2 ratio, compared with those under vacuum, argon and methane circumstances.