Magnetron deposited TiO_2 thin films -crystallization and temperature dependence of microstructure and phase composition

摘要

Temperature dependence of microstructure and phase composition of two sets of nanocrystalline TiO_2 thin films magnetron deposited on glass and silicon substrates have been studied by X-ray scattering. X-ray powder diffraction patterns were measured in paral-lel beam optics and evaluated by the total pattern fitting. After annealing, the amorphous films are crystallized, the nanocrystalline films consisting of anatase and rutile are partially crystallized while pure nanocrystalline anatase films remain nearly unchanged. With increas-ing temperature above 400℃ significant increase of crystallite size and transformation of anatase into rutile after 700℃ can be observed.