New stages for micromachine fabrication methods

摘要

Up to now, the main objective in micromachine fabrication efforts has been to achieve the ultra-fine processing of silicon materials on the basis of integrated circuit manufacturing technology. However, the micro-electro-mechanical system (MEMS) for silicon processing seems to have reached a limit in its refinement, judging from various work that has been carried out in recent years. In order to overcome this situation, various attempts have been made in regard to machine tooling by using micromachines. As one notable attempt, the New Energy and Industrial Technology Development Organization (NEDO) has been engaged in this endeavor with the cooperation of the Mechanical Engineering Laboratory of the Agency of Industrial Science and Technology, the Ministry of International Trade and Industry, and Olympus Optical Co., Ltd.