Interferometric Sensor and Calibration System for High-Precision Applications

摘要

A compact calibration system has been designed and successfully tested. The system consists of an interferometric angle and length sensor as well as a DSP-based hardware signal processing system. A PC-based frontend using Matlab allows an easy setup of user-specific scripts for numerous calibration tasks. The sensor's and system's capabilities have been successfully demonstrated using a high-resolution autocollimator, an AFM and an inductive tactile probe as calibration samples. Calibrations are possible with step sizes ranging from 20 pm up to +-6 (mu)m and several waveforms for dynamic calibration at frequencies currently up to 2 kHz.