Microtribological properties of hard amorphous carbon protective coatings for thin-film magnetic disks and heads

摘要

For long durability of magnetic media and head sliders, protective overcoats of hydrogenated amorphous carbon (a-C:H) are generally used. In this study, microtribological studies of hydrogenated amorphous carbon coatings deposited on asingle-crystal silicon using three different deposition techniques--sputtering, ion beam and cathodic arc--were studied using atomic force/friction force microscopy (AFM/FFM). Roughnesses of all coatings at two scan sizes of 1μm×1μm and 10μm×10μmare comparable. Surface topography of sputtered carbon coating shows some particulates on the surface. Cathodic arc carbon coating exhibits the lowest coefficient of friction value followed by ion beam and sputtered carbon coatings. Microscratch and wearresistance and nanohardness of cathodic arc carbon coating are superior to those of ion beam and sputtered carbon coatings. Cathodic arc deposited carbon coatings are potential candidates for magnetic disks and heads.