Phase-statistical method and device for high precise and high-efficiency angular measurements

摘要

A method and device for precise large-scale angular measurements in precision manufacturing is described. High accuracy of the method results from phase measurements by permanent integration over the total circle of the grating scales. According to this method, dividing errors of two of three scales are summed up to zero and the dividing error of the third scale is significantly reduced. An optoelectronic device based on this method has been developed, produced, and tested, and its design and operation are described. The device consists of optical grating scales of regular accuracy. This results in simplification of the structure of the measuring device and increases its reliability. Testing of the experimental batch shows that the accuracy of the device is ± 0.2 aresec. Different setups of the measured equipment and examples of the real-life application are shown.