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Interatomic interactions at interfaces of multilayered nanostructures (Co45Fe45Zr10/a-Si)(40) and (Co45Fe45Zr10/SiO2)(32)

机译:多层纳米结构(Co45Fe45Zr10 / a-Si)(40)和(Co45Fe45Zr10 / SiO2)(32)界面的原子间相互作用

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The interatomic interaction and phase formation at interfaces between the metallic layers Co45Fe45Zr10 and nonmetallic interlayers of amorphous silicon or silicon dioxide in multilayered nanostructures (Co45Fe45Zr10/a-Si)(40) and (Co45Fe45Zr10/SiO2)(32) have been investigated using ultrasoft X-ray emission spectroscopy (USXES) and X-ray diffractometry. The multilayered nanostructures have been fabricated by ion-beam sputtering of two targets onto the surface of a rotating glass-ceramic substrate. The investigations have demonstrated that, regardless of the expected composition of the interlayer (amorphous silicon or silicon dioxide), d-metal silicides, predominantly lower cobalt silicides, are formed at the metallic layer/interlayer interface. However, in this case, the thickness of silicide interfaces in the multilayered nanostructures with oxide interlayers (series O) has a significantly lower value of similar to 0.1 nm, and, therefore, the central layer of the interlayers remains oxide. In the multilayered nanostructures with amorphous silicon interlayers almost all silicon is consumed in the formation of nonmagnetic silicide phases. When the thickness of this interlayer exceeds the thickness of the metallic layer, the multilayered nanostructures become nonmagnetic.
机译:使用超软X研究了多层纳米结构(Co45Fe45Zr10 / a-Si)(40)和(Co45Fe45Zr10 / SiO2)(32)中的金属层Co45Fe45Zr10与非晶硅或二氧化硅的非金属中间层之间的原子间相互作用和相形成。射线发射光谱法(USXES)和X射线衍射仪。多层纳米结构是通过将两个靶材进行离子束溅射到旋转玻璃陶瓷基板的表面上而制成的。研究表明,不管中间层的预期组成(非晶硅或二氧化硅)如何,在金属层/中间层界面处都会形成d-金属硅化物,主要是低级硅化钴。然而,在这种情况下,具有氧化物夹层的多层纳米结构(O系列)中硅化物界面的厚度具有明显较低的值,类似于0.1 nm,因此,夹层的中间层仍为氧化物。在具有非晶硅中间层的多层纳米结构中,几乎所有的硅都在形成非磁性硅化物相时被消耗。当该中间层的厚度超过金属层的厚度时,多层纳米结构变为非磁性的。

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