Automatic monitoring of electrical parameters in the semiconductor industry based on ROC

摘要

An algorithm is described which "teaches" a machine to imitate the decision made by a "clever" operator about significant events in a trend chart. The machine fits a single parameter in the "learning" process so that the "error" is minimized. The process is applied to electrical tests (ETs) used in the microelectronic industry. This is done by constructing receiver operator characteristics (ROCs). Analysis of the ROC curve enables us to fix a single parameter so that the error is minimized. An experiment had been performed on the Poly CD electrical test monitor at Tower Semiconductor Ltd. It tested and verified the algorithm.