首页> 外国专利> Electrical fuse structure for use in semiconductor device in semiconductor industry, has cathode connectors coupled with cathode, where parameters of are connectors equal to or greater than two times of characteristic parameter of contact

Electrical fuse structure for use in semiconductor device in semiconductor industry, has cathode connectors coupled with cathode, where parameters of are connectors equal to or greater than two times of characteristic parameter of contact

机译:用于半导体工业中的半导体器件的电熔丝结构,其阴极连接器与阴极连接,其中连接器的参数等于或大于接触特征参数的两倍。

摘要

The structure (10) a securing-connection (14) provided between an anode (16) and a cathode (12). Cathode connectors (18) are coupled with the cathode, where parameters of the connectors are equal to or greater than two times of a minimal characteristic parameter of contact coupled to an active device. Anode connectors (20) are coupled with an anode, and width of the securing-connection is equal to or greater than minimal characteristic parameter of gate electrode or width of a metallic set. A diffusion barrier is arranged in openings between a dielectric unit and a metal connector.
机译:结构(10)设置在阳极(16)和阴极(12)之间的固定连接(14)。阴极连接器(18)与阴极耦合,其中连接器的参数等于或大于耦合到有源器件的最小接触特性参数的两倍。阳极连接器(20)与阳极连接,并且固定连接的宽度等于或大于栅电极的最小特征参数或金属组的宽度。扩散阻挡层布置在电介质单元和金属连接器之间的开口中。

著录项

  • 公开/公告号DE102010045073A1

    专利类型

  • 公开/公告日2011-05-05

    原文格式PDF

  • 申请/专利权人 TAIWAN SEMICONDUCTOR MFG. CO. LTD.;

    申请/专利号DE20101045073

  • 发明设计人 WU SHIEN-YANG;KUNG WEI-CHAN;

    申请日2010-09-10

  • 分类号H01L23/62;H01L21/768;

  • 国家 DE

  • 入库时间 2022-08-21 17:47:11

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