3-D Capability Turns CD-SEM Into Metrology System

摘要

As geometries shrink, line and space dimensions and contact hole diameters provide insufficient information for the precise, tight and accurate monitoring required for process quality control. At the 0.13 to 0.10 pm technology node and below, additional quality indicators become necessary. Contact hole ovalness and self-aligned contact hole measurement are good examples of these process characteristic indicators.