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Metrology's Challenges At The Nanoscale Realm

机译:纳米领域的计量学挑战

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A lain Diebold is an Empire Innovation Professor of nanoscale science at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany, and the executive director of CNSE's Center for Nanoscale Metrology. His research focuses on the impact of nanoscale dimensions on materials' physical properties, and he is very active in the area of nanoelec-tronics metrology. He is a member of the International Metrology Technical Working Group, founder and co-chair of the U.S. Metrology Technical Working Group for the 2008 International Technology Roadmap for Semiconductors (ITRS), and chair of the Manufacturing Science and Technology Group of the American Vacuum Society. Following are highlights from this month's podcast: SI: What challenges do you see as metrology goes deeper into nanoscale?
机译:莱恩·迪伯尔德(Lain Diebold)是奥尔巴尼大学纳米科学与工程学院(CNSE)的纳米科学帝国创新教授,也是CNSE纳米计量中心的执行主任。他的研究专注于纳米尺度对材料物理性能的影响,并且他在纳米电子计量学领域非常活跃。他是国际计量技术工作组的成员,2008年国际半导体技术路线图(ITRS)的美国计量技术工作组的创始人和联合主席,美国真空协会制造科学与技术组的主席。以下是本月播客中的亮点:SI:随着计量学进一步深入到纳米级,您会看到哪些挑战?

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